SKU:
NVP-EQ-DIF-001
$380,000.00
8-tube phosphorus oxychloride (POCl₃) quartz tube diffusion furnace for p/n junction formation in PERC and TOPCon cells. Uniformity ±0.25 Ω/□ across 5×5 grid. 800 wafers/hour across all tubes.
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