NAED HJT Full Stack PECVD Depositor — 6-Chamber

6-chamber cluster PECVD system for complete HJT cell stack deposition: i-a-Si:H / n-a-Si:H (front) and i-a-Si:H / p-a-Si:H (rear). Ultra-clean process for <0.5 ms minority carrier lifetime loss. 800 wph.